Micro/Nano Fabrication Technology


Silicon
VLSI Technology

The Science and
Engineering of …

Silicon Processing
for the VLSI Era

VLSI
Technology

VLSI Fabrication
Principles

Semiconductor
Fundamentals

Physics and Technology
of Semiconductor Devices

Microelectronics: Processing
and Device Design

Thin Film
Processes

Electronic
Materials Science

Electronic Materials:
Science and Technology

Materials Science
of Thin Films

Microsystem
Design

Fundamentals of
Microfabrication

Micromachined Transducers
Sourcebook

Fundamentals of
Semiconductor Fabrication

Thin-Film
Deposition


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