MEMS
Kristofer Pister
Professor of electrical engineering and computer sciences at University of California, Berkeley and the founder and CTO of Dust Networks., Ph.D. - UC Berkeley.
Note: the following books are not recommended by Professor Pister. They are books that have been used as reference texts in one/some courses he has taught.

Practical
MEMS

A Guide to
Hands-on MEMS
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