Micro/Nano Fabrication Technology


Silicon
VLSI Technology

The Science and
Engineering of ...

Silicon Processing
for the VLSI Era

VLSI
Technology

VLSI Fabrication
Principles

Semiconductor
Fundamentals

Physics and Technology
of Semiconductor Devices

Microelectronics: Processing
and Device Design

Thin Film
Processes

Electronic
Materials Science

Electronic Materials:
Science and Technology

Materials Science
of Thin Films

Microsystem
Design

Fundamentals of
Microfabrication

Micromachined Transducers
Sourcebook

Fundamentals of
Semiconductor Fabrication

Thin-Film
Deposition

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