Kristofer Pister
Professor of electrical engineering and computer sciences at University of California, Berkeley and the founder and CTO of Dust Networks., Ph.D. - UC Berkeley.

Note: the following books are not recommended by Professor Pister. They are books that have been used as reference texts in one/some courses he has taught.

Micro-electromechanical systems (MEMS) are a technology that combines mechanical and electrical components on a micro scale. They are used in a wide range of applications, including sensors, actuators, and micro-electronics.

One of the key advantages of MEMS is their small size, which allows them to be integrated into devices that would otherwise be too large or complex. This makes them useful in applications such as mobile phones, automobiles, and medical devices.

Another advantage of MEMS is that they can be mass-produced using standard semiconductor fabrication techniques. This makes them relatively inexpensive to produce, and allows for a high degree of design flexibility.

MEMS sensors are one of the most common applications of the technology. They can be used to measure a wide range of physical quantities, including temperature, pressure, acceleration, and vibration. These sensors are often used in applications such as automotive systems, medical devices, and consumer electronics.

MEMS actuators are also widely used in a variety of applications. These devices use electrical energy to create mechanical movement, and can be used for tasks such as adjusting the focus of a camera lens, controlling the flow of fluids, or moving a robotic arm.

MEMS technology also has potential for use in micro-electronics. Micro-electromechanical switches and relays, for example, could be used to improve the performance and reduce the size of electronic devices. Other potential applications include micro-electromechanical resonators and oscillators, which could be used to improve the accuracy and stability of electronic timing devices.

Overall, the field of MEMS is a rapidly growing and exciting area of electrical engineering. With its small size, low cost and high degree of design flexibility, MEMS is expected to have a significant impact on a wide range of industries and applications in the future.